EFFECT OF SUBSTRATE MISORIENTATION ON THE GROWTH OF GAXIN1-XP LATERAL QUANTUM-WELLS

被引:28
作者
CHEN, AC [1 ]
MOY, AM [1 ]
CHOU, LJ [1 ]
HSIEH, KC [1 ]
CHENG, KY [1 ]
机构
[1] UNIV ILLINOIS,COMP ENGN & MICROELECTR LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.113491
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the effects of misoriented GaAs substrates and varied substrate temperatures on the formation of GaxIn1−xP lateral quantum wells (LQWs) by the strain‐induced lateral‐layer ordering (SILO) process. Nominally [001] GaAs on‐axis substrates, [001] substrates cut 2° off toward the [110] direction, and [001] substrates cut 2° off toward the [1̄10] direction were used to simultaneously grow LQWs. The samples were characterized using plan‐view and cross‐sectional transmission electron microscopy and polarized photoluminescence spectroscopy. We found that regardless of the substrate misorientation or substrate growth temperature, the SILO process induced LQWs always formed along the [1̄10] direction; primarily determined by the direction of the group‐V dimer bonds on the surface during growth. © 1995, American Institute of Physics. All rights reserved.
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页码:2694 / 2696
页数:3
相关论文
共 12 条
[1]   CHEMICAL ORDERING IN GAXIN1-XP SEMICONDUCTOR ALLOY GROWN BY METALORGANIC VAPOR-PHASE EPITAXY [J].
BELLON, P ;
CHEVALIER, JP ;
MARTIN, GP ;
DUPONTNIVET, E ;
THIEBAUT, C ;
ANDRE, JP .
APPLIED PHYSICS LETTERS, 1988, 52 (07) :567-569
[2]   GAXIN1-XP MULTIPLE-QUANTUM-WIRE HETEROSTRUCTURES PREPARED BY THE STRAIN INDUCED LATERAL LAYER ORDERING PROCESS [J].
CHEN, AC ;
MOY, AM ;
PEARAH, PJ ;
HSIEH, KC ;
CHENG, KY .
APPLIED PHYSICS LETTERS, 1993, 62 (12) :1359-1361
[3]   FORMATION OF LATERAL QUANTUM-WELLS IN VERTICAL SHORT-PERIOD SUPERLATTICES BY STRAIN-INDUCED LATERAL-LAYER ORDERING PROCESS [J].
CHENG, KY ;
HSIEH, KC ;
BAILLARGEON, JN .
APPLIED PHYSICS LETTERS, 1992, 60 (23) :2892-2894
[4]   MOLECULAR-BEAM EPITAXY GROWTH MECHANISMS ON GAAS(100) SURFACES [J].
FARRELL, HH ;
HARBISON, JP ;
PETERSON, LD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (05) :1482-1489
[5]  
FUKIU T, 1988, J VAC SCI TECHNOL B, V6, P1373
[6]   EVIDENCE FOR THE EXISTENCE OF AN ORDERED STATE IN GA0.5IN0.5P GROWN BY METALORGANIC VAPOR-PHASE EPITAXY AND ITS RELATION TO BAND-GAP ENERGY [J].
GOMYO, A ;
SUZUKI, T ;
KOBAYASHI, K ;
KAWATA, S ;
HINO, I ;
YUASA, T .
APPLIED PHYSICS LETTERS, 1987, 50 (11) :673-675
[7]   OBSERVATION OF STRONG ORDERING IN GAXIN1-XP ALLOY SEMICONDUCTORS [J].
GOMYO, A ;
SUZUKI, T ;
IIJIMA, S .
PHYSICAL REVIEW LETTERS, 1988, 60 (25) :2645-2648
[8]  
HSEIH KC, 1990, 1990 MAT RES SOC FAL, P263
[9]   COMPOSITIONAL MODULATION AND LONG-RANGE ORDERING IN GAP INP SHORT-PERIOD SUPERLATTICES GROWN BY GAS SOURCE MOLECULAR-BEAM EPITAXY [J].
HSIEH, KC ;
BAILLARGEON, JN ;
CHENG, KY .
APPLIED PHYSICS LETTERS, 1990, 57 (21) :2244-2246
[10]   ALGAINP MULTIPLE-QUANTUM WIRE HETEROSTRUCTURE LASERS PREPARED BY THE STRAIN-INDUCED LATERAL-LAYER ORDERING PROCESS [J].
PEARAH, PJ ;
CHEN, AC ;
HSIEH, KC ;
CHENG, KY .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1994, 30 (02) :608-618