FORMATION OF SUB-MICRON SILICON-ON-INSULATOR STRUCTURES BY LATERAL OXIDATION OF SUBSTRATE-SILICON ISLANDS

被引：19

作者：

ARNEY, SC ^{[1
]}

MACDONALD, NC ^{[1
]}

机构：

[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.583993

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：341 / 345

页数：5

共 13 条

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