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- [4] Knights J. C., 1979, JPN J APPL PHYS, V18, P101
- [8] EFFECT OF DEPOSITION CONDITIONS ON INTRINSIC STRESS IN A-SI-H FILMS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (05): : 767 - 770