SF6 PLASMA-ETCHING OF SILICON - EVIDENCE OF SEQUENTIAL MULTILAYER FLUORINE ADSORPTION

被引：26

作者：

PELLETIER, J

ARNAL, Y

DURANDET, A

机构：

[1] CNRS, Meylan, Fr, CNRS, Meylan, Fr

来源：

EUROPHYSICS LETTERS | 1987年 / 4卷 / 09期

关键词：

SULFUR HEXAFLUORIDE;

D O I：

10.1209/0295-5075/4/9/016

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1049 / 1054

页数：6

共 18 条

[1] STUDIES ON PRODUCT LAYERS FORMED DURING ETCHING OF SI IN A SF6 PLASMA
BRANDT, WW
WAGNER, JJ
HONDA, T
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) : 1195 - 1198
[2] ELECTRON-SPECTROSCOPY STUDY OF SILICON SURFACES EXPOSED TO XEF2 AND THE CHEMISORPTION OF SIF4 ON SILICON
CHUANG, TJ
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) : 2614 - 2619
[3] SILICON DAMAGE CAUSED BY HYDROGEN CONTAINING PLASMAS
FRIESER, RG
MONTILLO, FJ
ZINGERMAN, NB
CHU, WK
MADER, SR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (11) : 2237 - 2241
[4] THE ETCHING OF SILICON IN DILUTED SF6 PLASMAS - CORRELATION BETWEEN THE FLUX OF INCIDENT SPECIES AND THE ETCHING KINETICS
MAHI, B
ARNAL, Y
POMOT, C
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (03): : 657 - 666
[5] SYNCHROTRON PHOTOEMISSION INVESTIGATION OF THE INITIAL-STAGES OF FLUORINE ATTACK ON SI SURFACES - RELATIVE ABUNDANCE OF FLUOROSILYL SPECIES
MCFEELY, FR
MORAR, JF
SHINN, ND
LANDGREN, G
HIMPSEL, FJ
[J]. PHYSICAL REVIEW B, 1984, 30 (02): : 764 - 770
[6] MCFEELY FR, 1985, B APS, V30, P461
[7] SYNCHROTRON PHOTOEMISSION INVESTIGATION - FLUORINE ON SILICON SURFACES
MORAR, JF
MCFEELY, FR
SHINN, ND
LANDGREN, G
HIMPSEL, FJ
[J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 174 - 176
[8] TITRATION METHOD FOR MEASURING FLUORINE ATOM CONCENTRATION IN MICROWAVE PLASMA-ETCHING
NINOMIYA, K
SUZUKI, K
NISHIMATSU, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (01): : 139 - 143
[9] REACTION OF ATOMIC FLUORINE WITH SILICON
NINOMIYA, K
SUZUKI, K
NISHIMATSU, S
OKADA, O
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) : 1177 - 1182
[10] PELLETIER J, 1987, IN PRESS J PHYS D, V20

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