FORMATION OF MICROGRATINGS FOR III-V-SEMICONDUCTOR INTEGRATED OPTOELECTRONICS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY

被引：2

作者：

MCINERNEY, J ^{[1
]}

FICE, MJ ^{[1
]}

AHMED, H ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,DEPT PHYS,MICROELECTR RES GRP,CAMBRIDGE CB3 0HE,ENGLAND

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1986年 / 4卷 / 10期

关键词：

D O I：

10.1109/JLT.1986.1074657

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1494 / 1501

页数：8

共 27 条

[1] RESOLUTION LIMITS OF PMMA RESIST FOR EXPOSURE WITH 50 KV ELECTRONS [J].

BROERS, AN .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (01) :166-170

[2] PROXIMITY EFFECT IN ELECTRON-BEAM LITHOGRAPHY [J].

CHANG, THP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1271-1275

[3] EXPOSURE MODEL FOR ELECTRON-SENSITIVE RESISTS [J].

GREENEICH, JS ;

VANDUZER, T .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1974, ED21 (05) :286-299

[4] DEVELOPER CHARACTERISTICS OF POLY-(METHYL METHACRYLATE) ELECTRON RESIST [J].

GREENEICH, JS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (07) :970-976

[5] EXPOSURE AND DEVELOPMENT MODELS USED IN ELECTRON-BEAM LITHOGRAPHY [J].

HAWRYLUK, RJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (01) :1-17

[6] ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING [J].

HAWRYLUK, RJ ;

HAWRYLUK, AM ;

SMITH, HI .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (06) :2551-2566

[7] LONGITUDINAL MODE BEHAVIORS OF 1.5 MU-M RANGE GAINASP-INP DISTRIBUTED FEEDBACK LASERS [J].

ITAYA, Y ;

MATSUOKA, T ;

KUROIWA, K ;

IKEGAMI, T .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1984, 20 (03) :230-235

[8] 2ND-ORDER DISTRIBUTED FEEDBACK LASERS WITH MODE SELECTION PROVIDED BY 1ST-ORDER RADIATION LOSSES [J].

KAZARINOV, RF ;

HENRY, CH .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (02) :144-150

[9] VOLTAGE DEPENDENCE OF PROXIMITY EFFECTS IN ELECTRON-BEAM LITHOGRAPHY [J].

KYSER, DF ;

TING, CH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1759-1763

[10] CHIRPED-GRATING DEMULTIPLEXERS IN DIELECTRIC WAVEGUIDES [J].

LIVANOS, AC ;

KATZIR, A ;

YARIV, A ;

HONG, CS .

APPLIED PHYSICS LETTERS, 1977, 30 (10) :519-521

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