INFLUENCE OF AS-DEPOSITED FILM STRUCTURE ON (100) TEXTURE IN LASER-RECRYSTALLIZED SILICON ON FUSED QUARTZ

被引：25

作者：

KIMURA, M

EGAMI, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 04期

关键词：

D O I：

10.1063/1.94770

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：420 / 422

页数：3

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[10] STRUCTURE AND STABILITY OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON FILMS
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