COBALT SILICIDE FORMATION INDUCED BY NEON BOMBARDMENT

被引：3

作者：

EDWARDS, SC ^{[1
]}

COLLINS, RA ^{[1
]}

DEARNALEY, G ^{[1
]}

机构：

[1] AERE,HARWELL OX11 0RA,OXON,ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 03期

关键词：

D O I：

10.1088/0022-3727/22/3/008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：431 / 436

页数：6

共 21 条

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[3]

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[5]

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[7] COBALT SILICIDE FORMATION BY ION MIXING [J].

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[8]

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[9] INTERACTIONS IN CO-SI THIN-FILM SYSTEM .1. KINETICS [J].

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[10] ION MIXING AND PHASE-DIAGRAMS [J].

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