TIME-RESOLVED AND SPACE-RESOLVED SI LATTICE-TEMPERATURE MEASUREMENTS DURING CW LASER ANNEALING OF SI ON SAPPHIRE

被引：17

作者：

MURAKAMI, K

TOHMIYA, Y

TAKITA, K

MASUDA, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 06期

关键词：

D O I：

10.1063/1.95347

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：659 / 661

页数：3

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