COMPLETE ELECTRICAL CHARACTERIZATION OF RECOMBINATION PROPERTIES OF TITANIUM IN SILICON

被引：45

作者：

WANG, AC ^{[1
]}

SAH, CT ^{[1
]}

机构：

[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期

关键词：

D O I：

10.1063/1.334095

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1021 / 1031

页数：11

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