SUITABLE PRECURSOR SOLVENT SYSTEMS FOR LASER-INDUCED SURFACE PRENUCLEATION

被引：17

作者：

PREUSS, S

STUKE, M

机构：

[1] Max-Planck-Institut für biophysikalische Chemie, D-3400 Göttingen

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90061-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin palladium acetate films, generated by spin coating from a solution of palladium acetate in ethyl acetate, were locally prenucleated by KrF excimer laser irradiation. Copper was selectively deposited on the palladium nuclei using electroless plating. Deposition of copper nuclei from copper formate using KrF excimer laser irradiation was investigated. It is shown that these copper nuclei can also be used for the electroless plating process.

引用

页码：308 / 310

页数：3

共 27 条

[1] LASER-ASSISTED DEPOSITION FOR ELECTRONIC PACKAGING APPLICATIONS
BAUER, A
GANZ, J
HESSE, K
KOHLER, E
[J]. APPLIED SURFACE SCIENCE, 1990, 46 (1-4) : 113 - 120
[2] BAUERLE D, 1986, CHEM PROCESSING LASE
[3] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF ALUMINUM
BAUM, TH
LARSON, CE
JACKSON, RL
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (12) : 1264 - 1266
[4] PROJECTION PRINTING OF GOLD MICROPATTERNS BY PHOTOCHEMICAL DECOMPOSITION
BAUM, TH
MARINERO, EE
JONES, CR
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (18) : 1213 - 1215
[5] BEUTEL KK, 1982, SAFE USE SOLVENTS P, P105
[6] GROWTH-RATES AND ELECTRICAL-CONDUCTIVITY OF MICROSCOPIC OHMIC CONTACTS FABRICATED BY LASER CHEMICAL VAPOR-DEPOSITION OF PLATINUM
BRAICHOTTE, D
VANDENBERGH, H
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (04): : 353 - 359
[7] GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES
BRAICHOTTE, D
VANDENBERGH, H
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04): : 337 - 343
[8] LASER DIRECT WRITING OF ALUMINUM CONDUCTORS
CACOURIS, T
SCELSI, G
SHAW, P
SCARMOZZINO, R
OSGOOD, RM
KRCHNAVEK, RR
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (22) : 1865 - 1867
[9] COLE HS, 1988, LASER PROCESSES MICR, V88, P187
[10] Esrom H., 1989, Chemtronics, V4, P216

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