共 52 条
- [11] BROWN SC, 1966, INTRO ELECTRICAL DIS, P158
- [13] CHAMPION KSW, 1953, MIT31 RES LAB EL Q P
- [16] ELECTRIC ACTIVATION OF CHEMICAL REACTIONS [J]. TRANSACTIONS OF THE ELECTROCHEMICAL SOCIETY, 1947, 91 : 407 - 417
- [18] LASER DIAGNOSTICS OF PLASMA-ETCHING - MEASUREMENT OF CL2+ IN A CHLORINE DISCHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 817 - 823
- [20] DONNELLY VM, 1984, ION BOMBARDMENT MOFI, P323