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PHOTO-METALORGANIC MOLECULAR-BEAM EPITAXY - A NEW EPITAXIAL-GROWTH TECHNIQUE
被引:15
作者
:
TOKUMITSU, E
论文数:
0
引用数:
0
h-index:
0
TOKUMITSU, E
YAMADA, T
论文数:
0
引用数:
0
h-index:
0
YAMADA, T
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
|
1989年
/ 7卷
/ 03期
关键词
:
D O I
:
10.1116/1.575870
中图分类号
:
TB3 [工程材料学];
学科分类号
:
0805 ;
080502 ;
摘要
:
引用
收藏
页码:706 / 710
页数:5
相关论文
共 21 条
[1]
PHOTOENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZNSE FILMS USING DIETHYLZINC AND DIMETHYLSELENIDE
[J].
ANDO, H
论文数:
0
引用数:
0
h-index:
0
ANDO, H
;
INUZUKA, H
论文数:
0
引用数:
0
h-index:
0
INUZUKA, H
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
JOURNAL OF APPLIED PHYSICS,
1985,
58
(02)
:802
-805
[2]
LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SIO2
[J].
BOYER, PK
论文数:
0
引用数:
0
h-index:
0
BOYER, PK
;
ROCHE, GA
论文数:
0
引用数:
0
h-index:
0
ROCHE, GA
;
RITCHIE, WH
论文数:
0
引用数:
0
h-index:
0
RITCHIE, WH
;
COLLINS, GJ
论文数:
0
引用数:
0
h-index:
0
COLLINS, GJ
.
APPLIED PHYSICS LETTERS,
1982,
40
(08)
:716
-719
[3]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
;
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:783
-785
[4]
GROWTH OF III-V SEMICONDUCTORS BY MOLECULAR-BEAM EPITAXY AND THEIR PROPERTIES
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
CHO, AY
.
THIN SOLID FILMS,
1983,
100
(04)
:291
-317
[5]
CHO AY, 1984, 1ST INT WORKSH FUT E
[6]
LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
[J].
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
;
OSGOOD, RM
论文数:
0
引用数:
0
h-index:
0
OSGOOD, RM
;
DEUTSCH, TF
论文数:
0
引用数:
0
h-index:
0
DEUTSCH, TF
.
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1980,
16
(11)
:1233
-1243
[7]
SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION
[J].
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
;
OSGOOD, RM
论文数:
0
引用数:
0
h-index:
0
OSGOOD, RM
;
DEUTSCH, TF
论文数:
0
引用数:
0
h-index:
0
DEUTSCH, TF
.
APPLIED PHYSICS LETTERS,
1981,
38
(11)
:946
-948
[8]
SELECTIVE GROWTH OF GAAS IN THE MOMBE AND MOCVD SYSTEMS
[J].
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
BRAUERS, A
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BRAUERS, A
;
GRAFAHREND, F
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
GRAFAHREND, F
;
PLASS, C
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PLASS, C
;
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
WERNER, K
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WERNER, K
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
LUTH, H
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BALK, P
.
JOURNAL OF CRYSTAL GROWTH,
1986,
77
(1-3)
:303
-309
[9]
PATTERNED ALUMINUM GROWTH VIA EXCIMER LASER ACTIVATED METALORGANIC CHEMICAL VAPOR-DEPOSITION
[J].
HIGASHI, GS
论文数:
0
引用数:
0
h-index:
0
HIGASHI, GS
;
FLEMING, CG
论文数:
0
引用数:
0
h-index:
0
FLEMING, CG
.
APPLIED PHYSICS LETTERS,
1986,
48
(16)
:1051
-1053
[10]
ELECTRONIC AND OPTICAL-PROPERTIES OF P-TYPE AMORPHOUS-SILICON AND WIDE BAND-GAP AMORPHOUS-SILICON CARBIDE FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION
[J].
INOUE, T
论文数:
0
引用数:
0
h-index:
0
INOUE, T
;
TANAKA, T
论文数:
0
引用数:
0
h-index:
0
TANAKA, T
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
APPLIED PHYSICS LETTERS,
1984,
44
(09)
:871
-873
←
1
2
3
→
共 21 条
[1]
PHOTOENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZNSE FILMS USING DIETHYLZINC AND DIMETHYLSELENIDE
[J].
ANDO, H
论文数:
0
引用数:
0
h-index:
0
ANDO, H
;
INUZUKA, H
论文数:
0
引用数:
0
h-index:
0
INUZUKA, H
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
JOURNAL OF APPLIED PHYSICS,
1985,
58
(02)
:802
-805
[2]
LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SIO2
[J].
BOYER, PK
论文数:
0
引用数:
0
h-index:
0
BOYER, PK
;
ROCHE, GA
论文数:
0
引用数:
0
h-index:
0
ROCHE, GA
;
RITCHIE, WH
论文数:
0
引用数:
0
h-index:
0
RITCHIE, WH
;
COLLINS, GJ
论文数:
0
引用数:
0
h-index:
0
COLLINS, GJ
.
APPLIED PHYSICS LETTERS,
1982,
40
(08)
:716
-719
[3]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
;
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:783
-785
[4]
GROWTH OF III-V SEMICONDUCTORS BY MOLECULAR-BEAM EPITAXY AND THEIR PROPERTIES
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
CHO, AY
.
THIN SOLID FILMS,
1983,
100
(04)
:291
-317
[5]
CHO AY, 1984, 1ST INT WORKSH FUT E
[6]
LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
[J].
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
;
OSGOOD, RM
论文数:
0
引用数:
0
h-index:
0
OSGOOD, RM
;
DEUTSCH, TF
论文数:
0
引用数:
0
h-index:
0
DEUTSCH, TF
.
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1980,
16
(11)
:1233
-1243
[7]
SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION
[J].
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
;
OSGOOD, RM
论文数:
0
引用数:
0
h-index:
0
OSGOOD, RM
;
DEUTSCH, TF
论文数:
0
引用数:
0
h-index:
0
DEUTSCH, TF
.
APPLIED PHYSICS LETTERS,
1981,
38
(11)
:946
-948
[8]
SELECTIVE GROWTH OF GAAS IN THE MOMBE AND MOCVD SYSTEMS
[J].
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
BRAUERS, A
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BRAUERS, A
;
GRAFAHREND, F
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
GRAFAHREND, F
;
PLASS, C
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PLASS, C
;
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
WERNER, K
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WERNER, K
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
LUTH, H
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BALK, P
.
JOURNAL OF CRYSTAL GROWTH,
1986,
77
(1-3)
:303
-309
[9]
PATTERNED ALUMINUM GROWTH VIA EXCIMER LASER ACTIVATED METALORGANIC CHEMICAL VAPOR-DEPOSITION
[J].
HIGASHI, GS
论文数:
0
引用数:
0
h-index:
0
HIGASHI, GS
;
FLEMING, CG
论文数:
0
引用数:
0
h-index:
0
FLEMING, CG
.
APPLIED PHYSICS LETTERS,
1986,
48
(16)
:1051
-1053
[10]
ELECTRONIC AND OPTICAL-PROPERTIES OF P-TYPE AMORPHOUS-SILICON AND WIDE BAND-GAP AMORPHOUS-SILICON CARBIDE FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION
[J].
INOUE, T
论文数:
0
引用数:
0
h-index:
0
INOUE, T
;
TANAKA, T
论文数:
0
引用数:
0
h-index:
0
TANAKA, T
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
APPLIED PHYSICS LETTERS,
1984,
44
(09)
:871
-873
←
1
2
3
→