APPLICATION OF THE O-16(D, ALPHA)N-14 NUCLEAR-REACTION TO OXYGEN DEPTH PROFILING IN SIMOX STRUCTURES

被引：4

作者：

DUBUS, M ^{[1
]}

MARGAIL, J ^{[1
]}

MARTIN, P ^{[1
]}

机构：

[1] CEN,CEA,IRDI,ELECTR & TECHNOL INFORAT LAB,F-38041 GRENOBLE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90363-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：559 / 562

页数：4

共 13 条

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[3]

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[7] COMPARISON OF THE NUCLEAR-REACTIONS O-18(P,ALPHA)N-15 AND O-16(D,ALPHA)N-14 TO STUDY THE OXYGEN EFFECTS IN PT SILICIDE FORMATION [J].

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[8]

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[9] LOW-CONCENTRATION OXYGEN DEPTH PROFILING BY O-16(D,ALPHA)N-14 REACTION [J].

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[10] STUDY OF THERMALLY OXIDIZED SIO2 SURFACE-LAYERS BY MEANS OF NUCLEAR-REACTIONS [J].

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