EFFECTS OF CARRIER GAS AND SUBSTRATE ON THE ELECTRICAL-PROPERTIES OF EPITAXIAL GAAS GROWN BY THE SINGLE FLAT TEMPERATURE ZONE CHLORIDE VPE METHOD

被引：4

作者：

HASEGAWA, F ^{[1
]}

YAMATE, T ^{[1
]}

YAMAMOTO, T ^{[1
]}

NANNICHI, Y ^{[1
]}

KOUKITU, A ^{[1
]}

SEKI, H ^{[1
]}

机构：

[1] TOKYO UNIV AGR & TECHNOL,DEPT IND CHEM,KOGANEI,TOKYO 184,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 08期

关键词：

D O I：

10.1143/JJAP.24.1036

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1036 / 1042

页数：7

共 23 条

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