EFFECT OF CHEMICAL BONDING ON POSITIVE SECONDARY-ION YIELDS IN SPUTTERING

被引：16

作者：

MANN, K

YU, ML

机构：

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.35.6043

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：6043 / 6050

页数：8

共 23 条

[1] ANGULAR-DISTRIBUTIONS OF SPUTTERED PARTICLES [J].

BAXTER, JP ;

SCHICK, GA ;

SINGH, J ;

KOBRIN, PH ;

WINOGRAD, N .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1218-1221

[2] DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].

BENNINGHOVEN, A .

SURFACE SCIENCE, 1975, 53 (DEC) :596-625

[3] MECHANISM OF SIMS MATRIX EFFECT [J].

DELINE, VR ;

KATZ, W ;

EVANS, CA .

APPLIED PHYSICS LETTERS, 1978, 33 (09) :832-835

[4] PHOTOEMISSION STUDIES OF SURFACE-STATES AND OXIDATION OF GROUP-IV SEMICONDUCTORS [J].

GARNER, CM ;

LINDAU, I ;

MILLER, JN ;

PIANETTA, P ;

SPICER, WE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :372-375

[5]

GNASER H, 1983, NUCL INSTRUM METHODS, V218, P312, DOI 10.1016/0167-5087(83)90997-3

[6] OXYGEN-CHEMISORPTION AND OXIDE FORMATION ON SI(111) AND SI(100) SURFACES [J].

HOLLINGER, G ;

HIMPSEL, FJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :640-645

[7] SOLIDS ANALYSIS USING ENERGETIC ION-BOMBARDMENT AND MULTIPHOTON RESONANCE IONIZATION WITH TIME-OF-FLIGHT DETECTION [J].

KIMOCK, FM ;

BAXTER, JP ;

PAPPAS, DL ;

KOBRIN, PH ;

WINOGRAD, N .

ANALYTICAL CHEMISTRY, 1984, 56 (14) :2782-2791

[8] IONIZATION PROBABILITY OF SPUTTERED ATOMS [J].

LANG, ND .

PHYSICAL REVIEW B, 1983, 27 (04) :2019-2029

[9] THERMAL NITRIDATION OF SILICON - AN XPS AND LEED INVESTIGATION [J].

MAILLOT, C ;

ROULET, H ;

DUFOUR, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (03) :316-319

[10] THE INFLUENCE OF BOMBARDMENT CONDITIONS UPON THE SPUTTERING AND SECONDARY ION YIELDS OF SILICON [J].

MORGAN, AE ;

DEGREFTE, HAM ;

WARMOLTZ, N ;

WERNER, HW ;

TOLLE, HJ .

APPLIED SURFACE SCIENCE, 1981, 7 (04) :372-392

← 1 2 3 →