MULTICHAMBER REACTORS - A SOLUTION TO THE PROBLEM OF GRADED HETEROINTERFACES IN HOT WALL VPE SYSTEMS

被引：1

作者：

BEUCHET, G

CLEMENSAT, D

THEBAULT, P

机构：

来源：

JOURNAL DE PHYSIQUE | 1982年 / 43卷 / NC-5期

关键词：

D O I：

10.1051/jphyscol:1982530

中图分类号：

学科分类号：

摘要：

引用

页码：259 / 266

页数：8

共 22 条

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