SILICIDES FOR VLSI INTERCONNECTS

被引：22

作者：

ROSSER, P

TOMKINS, G

机构：

来源：

VACUUM | 1985年 / 35卷 / 10-1期

关键词：

D O I：

10.1016/0042-207X(85)90361-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：419 / 434

页数：16

相关论文

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