ADDITIONAL X-RAY AND ELECTRON-DIFFRACTION PEAKS OF POLYCRYSTALLINE SILICON FILMS

被引：31

作者：

HENDRIKS, M ^{[1
]}

RADELAAR, S ^{[1
]}

BEERS, AM ^{[1
]}

BLOEM, J ^{[1
]}

机构：

[1] CATHOLIC UNIV NIJMEGEN,MAT RES INST,DEPT SOLID STATE CHEM,6525 ED NIJMEGEN,NETHERLANDS

来源：

THIN SOLID FILMS | 1984年 / 113卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90388-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：59 / 72

页数：14

共 46 条

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