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PROPERTIES OF SIO2 GROWN IN PRESENCE OF HCL OR C-12
被引:66
作者
:
VANDERMEULEN, YJ
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
VANDERMEULEN, YJ
[
1
]
OSBURN, CM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
OSBURN, CM
[
1
]
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
ZIEGLER, JF
[
1
]
机构
:
[1]
IBM CORP,TJ WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1975年
/ 122卷
/ 02期
关键词
:
D O I
:
10.1149/1.2134196
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:284 / 290
页数:7
相关论文
共 34 条
[1]
TESTS OF BRAGG RULE FOR ENERGY-LOSS OF HE-4 IONS IN SOLID COMPOUNDS
BAGLIN, JEE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAGLIN, JEE
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
ZIEGLER, JF
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(03)
: 1413
-
1415
[2]
BRAGG WH, 1905, PHILOS MAG, V10, P5318
[3]
DENSITIES OF AMORPHOUS SI FILMS BY NUCLEAR BACKSCATTERING
BRODSKY, MH
论文数:
0
引用数:
0
h-index:
0
BRODSKY, MH
KAPLAN, D
论文数:
0
引用数:
0
h-index:
0
KAPLAN, D
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
ZIEGLER, JF
[J].
APPLIED PHYSICS LETTERS,
1972,
21
(07)
: 305
-
&
[4]
OXIDE CHARGE REDUCTION BY CHEMICAL GETTERING WITH TRICHLOROETHYLENE DURING THERMAL OXIDATION OF SILICON
CHEN, MC
论文数:
0
引用数:
0
h-index:
0
CHEN, MC
HILE, JW
论文数:
0
引用数:
0
h-index:
0
HILE, JW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1972,
119
(02)
: 223
-
+
[5]
AUGER ANALYSIS OF CHLORINE IN HCL-GROWN, OR CL2-GROWN SIO2 FILMS
CHOU, NJ
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
CHOU, NJ
OSBURN, CM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
OSBURN, CM
VANDERME.YJ
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
VANDERME.YJ
HAMMER, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
HAMMER, R
[J].
APPLIED PHYSICS LETTERS,
1973,
22
(08)
: 380
-
381
[6]
RANGE DISTRIBUTION OF IMPLANTED IONS IN SIO2, SI3N4, AND AL2O3
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
CHU, WK
CROWDER, BL
论文数:
0
引用数:
0
h-index:
0
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IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
CROWDER, BL
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MAYER, JW
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
ZIEGLER, JF
[J].
APPLIED PHYSICS LETTERS,
1973,
22
(10)
: 490
-
492
[7]
PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS
CHU, WK
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CHU, WK
MAYER, JW
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NICOLET, MA
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NICOLET, MA
BUCK, TM
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CALTECH,PASADENA,CA 91109
BUCK, TM
AMSEL, G
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
AMSEL, G
EISEN, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
EISEN, F
[J].
THIN SOLID FILMS,
1973,
17
(01)
: 1
-
41
[8]
CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
SKLAR, M
论文数:
0
引用数:
0
h-index:
0
SKLAR, M
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
SNOW, EH
论文数:
0
引用数:
0
h-index:
0
SNOW, EH
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(03)
: 266
-
+
[9]
SODIUM ION DRIFT THROUGH PHOSPHOSILICATE GLASS-SIO2 FILMS
ELDRIDGE, JM
论文数:
0
引用数:
0
h-index:
0
ELDRIDGE, JM
KERR, DR
论文数:
0
引用数:
0
h-index:
0
KERR, DR
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(06)
: 986
-
&
[10]
GDULA RA, PRIVATE COMMUNICATIO
←
1
2
3
4
→
共 34 条
[1]
TESTS OF BRAGG RULE FOR ENERGY-LOSS OF HE-4 IONS IN SOLID COMPOUNDS
BAGLIN, JEE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAGLIN, JEE
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
ZIEGLER, JF
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(03)
: 1413
-
1415
[2]
BRAGG WH, 1905, PHILOS MAG, V10, P5318
[3]
DENSITIES OF AMORPHOUS SI FILMS BY NUCLEAR BACKSCATTERING
BRODSKY, MH
论文数:
0
引用数:
0
h-index:
0
BRODSKY, MH
KAPLAN, D
论文数:
0
引用数:
0
h-index:
0
KAPLAN, D
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
ZIEGLER, JF
[J].
APPLIED PHYSICS LETTERS,
1972,
21
(07)
: 305
-
&
[4]
OXIDE CHARGE REDUCTION BY CHEMICAL GETTERING WITH TRICHLOROETHYLENE DURING THERMAL OXIDATION OF SILICON
CHEN, MC
论文数:
0
引用数:
0
h-index:
0
CHEN, MC
HILE, JW
论文数:
0
引用数:
0
h-index:
0
HILE, JW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1972,
119
(02)
: 223
-
+
[5]
AUGER ANALYSIS OF CHLORINE IN HCL-GROWN, OR CL2-GROWN SIO2 FILMS
CHOU, NJ
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
CHOU, NJ
OSBURN, CM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
OSBURN, CM
VANDERME.YJ
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
VANDERME.YJ
HAMMER, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
HAMMER, R
[J].
APPLIED PHYSICS LETTERS,
1973,
22
(08)
: 380
-
381
[6]
RANGE DISTRIBUTION OF IMPLANTED IONS IN SIO2, SI3N4, AND AL2O3
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
CHU, WK
CROWDER, BL
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
CROWDER, BL
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MAYER, JW
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
ZIEGLER, JF
[J].
APPLIED PHYSICS LETTERS,
1973,
22
(10)
: 490
-
492
[7]
PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
CHU, WK
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MAYER, JW
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
NICOLET, MA
BUCK, TM
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
BUCK, TM
AMSEL, G
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
AMSEL, G
EISEN, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
EISEN, F
[J].
THIN SOLID FILMS,
1973,
17
(01)
: 1
-
41
[8]
CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
SKLAR, M
论文数:
0
引用数:
0
h-index:
0
SKLAR, M
GROVE, AS
论文数:
0
引用数:
0
h-index:
0
GROVE, AS
SNOW, EH
论文数:
0
引用数:
0
h-index:
0
SNOW, EH
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(03)
: 266
-
+
[9]
SODIUM ION DRIFT THROUGH PHOSPHOSILICATE GLASS-SIO2 FILMS
ELDRIDGE, JM
论文数:
0
引用数:
0
h-index:
0
ELDRIDGE, JM
KERR, DR
论文数:
0
引用数:
0
h-index:
0
KERR, DR
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(06)
: 986
-
&
[10]
GDULA RA, PRIVATE COMMUNICATIO
←
1
2
3
4
→