MODEL DEPENDENCE OF RECOIL IMPLANTATION IN BINARY SOLIDS

被引：18

作者：

GOKTEPE, OF

ANDREADIS, TD

ROSEN, M

MUELLER, GP

ROUSH, ML

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

[2] UNIV MARYLAND,DEPT CHEM & NUCL ENGN,COLLEGE PK,MD 20742

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90542-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：434 / 438

页数：5

共 26 条

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J].

ANDERSEN, HH .

APPLIED PHYSICS, 1979, 18 (02) :131-140

[2]

ANDERSEN HH, 1980, S PHYS ION GAS, P241

[3]

DAVARYA F, 1982, 1982 P SUMM COMP SIM, P243

[4] TEMPERATURE AND DIFFUSION EFFECTS IN PREFERENTIAL SPUTTERING OF CRSI2 [J].

FERNANDEZ, R ;

SHRETER, U ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :513-519

[5] MULTIPLE-ENERGY ION-IMPLANTATION EFFECTS ON DISTRIBUTION PROFILES - A MONTE-CARLO CASE-STUDY [J].

GOKTEPE, OF .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :13-20

[6] ATTEMPT TO UNDERSTAND PREFERENTIAL SPUTTERING [J].

KELLY, R .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :553-558

[7] SPUTTERING OF PTSI [J].

LIAU, ZL ;

MAYER, JW ;

BROWN, WL ;

POATE, JM .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) :5295-5305

[8] ION-BEAM MIXING OF MARKER LAYERS IN AL AND SI [J].

MANTL, S ;

REHN, LE ;

AVERBACK, RS ;

THOMPSON, LJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :622-625

[9] TRIDYN - A TRIM SIMULATION CODE INCLUDING DYNAMIC COMPOSITION CHANGES [J].

MOLLER, W ;

ECKSTEIN, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :814-818

[10] DIFFERENTIAL CROSS-SECTION AND RELATED INTEGRALS FOR THE MOLIERE POTENTIAL [J].

MUELLER, GP .

RADIATION EFFECTS LETTERS, 1980, 50 (3-6) :87-92

← 1 2 3 →