LATERAL DOPANT TRANSPORT DURING LASER RECRYSTALLIZATION OF POLYSILICON

被引：5

作者：

KAMINS, TI

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 09期

关键词：

D O I：

10.1063/1.94079

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：832 / 834

页数：3

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