PROFILING OF DEFECTS USING DEEP LEVEL TRANSIENT SPECTROSCOPY

被引：52

作者：

STIEVENARD, D

VUILLAUME, D

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 03期

关键词：

D O I：

10.1063/1.337340

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：973 / 979

页数：7

共 20 条

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