AIN FILM PREPARATION ON GLASS BY SPUTTERING SYSTEM WITH FACING TARGETS

被引:8
作者
TOMINAGA, K
SHINTANI, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷
关键词
D O I
10.7567/JJAPS.28S2.7
中图分类号
O59 [应用物理学];
学科分类号
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页码:7 / 10
页数:4
相关论文
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