TWO-DIMENSIONAL DYNAMIC NUMERICAL-SIMULATION OF AN SOI FORMATION PROCESS IN LASER-INDUCED SEEDED LATERAL GROWTH

被引：6

作者：

OHKURA, M

ICHIKAWA, M

MIYAO, M

SUNAMI, H

TOKUYAMA, T

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1985年 / 32卷 / 07期

关键词：

D O I：

10.1109/T-ED.1985.22122

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1347 / 1352

页数：6

共 11 条

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[9] CHARACTERIZATION OF SEEDED-LATERAL EPITAXIAL LAYER BY MICRO-PROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION [J].

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[10]

OHKURA M, UNPUB

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