CHARACTERIZATION OF PVD (TI,CR)NX HARD COATINGS

被引：46

作者：

JEHN, HA ^{[1
]}

THIERGARTEN, F ^{[1
]}

EBERSBACH, E ^{[1
]}

FABIAN, D ^{[1
]}

机构：

[1] SCHMALKALDEN CHEM MBH,GESELL FERTIGUNGSTECH & ENTWICKLUNG,INST PHYS & MECH TECHNOL,O-9010 KARL MARX STADT,GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 50卷 / 01期

关键词：

D O I：

10.1016/0257-8972(91)90191-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Recently, the interest in ternary nitrides, e.g. (Ti,Al)N, (Ti,Zr)N etc., as wear resistant and decorative hard coatings is increasing. (Ti,Cr)N appears to be more corrosion resistant and to have a higher toughness than TiN. In order to obtain more information on these types of hard coatings, (Ti,Cr)N(x) films were deposited by reactive d.c. magnetron sputtering and by reactive ion plating using hollow cathode discharge low voltage electron beam evaporation. The films were characterized with respect to their chemical composition, morphology, structure, hardness, critical load, wear and friction, as well as their decorative and corrosive properties.

引用

页码：45 / 52

页数：8

共 26 条

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