FOCUSED ION-BEAM INDUCED FINE PATTERNS OF ORGANOGOLD FILMS

被引：12

作者：

OHMURA, Y ^{[1
]}

SHIOKAWA, T ^{[1
]}

TOYODA, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] INST PHYS & CHEM RES, WAKO, SAITAMA 35101, JAPAN

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 19期

关键词：

D O I：

10.1063/1.98615

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1500 / 1502

页数：3

共 6 条

[1] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J].

EHRLICH, DJ ;

OSGOOD, RM ;

SILVERSMITH, DJ ;

DEUTSCH, TF .

ELECTRON DEVICE LETTERS, 1980, 1 (06) :101-103

[2] ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS [J].

GAMO, K ;

TAKAKURA, N ;

SAMOTO, N ;

SHIMIZU, R ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L293-L295

[3] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS [J].

GROSS, ME ;

FISANICK, GJ ;

GALLAGHER, PK ;

SCHNOES, KJ ;

FENNELL, MD .

APPLIED PHYSICS LETTERS, 1985, 47 (09) :923-925

[4] DECOMPOSITION OF PALLADIUM ACETATE FILMS WITH A MICROFOCUSED ION-BEAM [J].

HARRIOTT, LR ;

CUMMINGS, KD ;

GROSS, ME ;

BROWN, WL .

APPLIED PHYSICS LETTERS, 1986, 49 (24) :1661-1662

[5] FOCUSED ION-BEAM INDUCED DEPOSITION OF GOLD [J].

SHEDD, GM ;

LEZEC, H ;

DUBNER, AD ;

MELNGAILIS, J .

APPLIED PHYSICS LETTERS, 1986, 49 (23) :1584-1586

[6] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS [J].

VENKATESAN, T ;

FORREST, SR ;

KAPLAN, ML ;

MURRAY, CA ;

SCHMIDT, PH ;

WILKENS, BJ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3150-3153

← 1 →