THE INFLUENCE OF LIGHT ON THE PROPERTIES OF NMOS TRANSISTORS IN LASER MU-ZONED CRYSTALLIZED SILICON LAYERS

被引:6
作者
BOSCH, MA
HERBST, D
TEWKSBURY, SK
机构
关键词
D O I
10.1109/EDL.1984.25888
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:204 / 206
页数:3
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共 9 条
[1]  
BOSCH MA, 1982, JUN P EL MAT C FORT
[2]   ISLAND-EDGE EFFECTS OF TRANSISTORS FABRICATED IN LARGE-AREA LASER MICRO-ZONE CRYSTALLIZED SI ON INSULATOR [J].
HERBST, D ;
BOSCH, MA ;
TEWKSBURY, SR .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (08) :280-282
[3]   SUBSTRATE INFLUENCE ON NMOS TRANSISTORS IN LARGE-AREA LASER CRYSTALLIZED ISOLATED SI LAYERS [J].
HERBST, D ;
BOSCH, MA ;
TEWKSBURY, SK .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (07) :205-207
[4]   SINGLE-CRYSTAL SILICON TRANSISTORS IN LASER-CRYSTALLIZED THIN-FILMS ON BULK GLASS [J].
JOHNSON, NM ;
BIEGELSEN, DK ;
TUAN, HC ;
MOYER, MD ;
FENNELL, LE .
ELECTRON DEVICE LETTERS, 1982, 3 (12) :369-372
[5]   LATERAL ZONE GROWTH AND CHARACTERIZATION OF DEVICE QUALITY SILICON-ON-INSULATOR WAFERS [J].
LAM, HW ;
PINIZZOTTO, RF ;
MALHI, SDS ;
VAANDRAGER, BL .
APPLIED PHYSICS LETTERS, 1982, 41 (11) :1083-1085
[6]   SILICON PHOTODETECTOR INTEGRATED ON A LITHIUM TANTALATE SUBSTRATE [J].
REEDY, RE ;
LEE, SH .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :19-21
[7]  
SZE SM, 1981, PHYSICS SEMICONDUCTO
[8]   INFLUENCE OF FLOATING SUBSTRATE POTENTIAL ON CHARACTERISTICS OF ESFI MOS-TRANSISTORS [J].
TIHANYI, J ;
SCHLOTTERER, H .
SOLID-STATE ELECTRONICS, 1975, 18 (04) :309-314
[9]   IMPROVED TECHNIQUES FOR GROWTH OF LARGE-AREA SINGLE-CRYSTAL SI SHEETS OVER SIO2 USING LATERAL EPITAXY BY SEEDED SOLIDIFICATION [J].
TSAUR, BY ;
FAN, JCC ;
GEIS, MW ;
SILVERSMITH, DJ ;
MOUNTAIN, RW .
APPLIED PHYSICS LETTERS, 1981, 39 (07) :561-563