OXIDATION-INDUCED STACKING-FAULTS IN SILICON .1. NUCLEATION PHENOMENON

[1] DIFFRACTION CONTRAST ANALYSIS OF 2-DIMENSIONAL DEFECTS PRESENT IN SILICON AFTER ANNEALING [J]. PHILOSOPHICAL MAGAZINE, 1966, 13 (121): : 71 - &

[2] 2-DIMENSIONAL DEFECTS IN SILICON AFTER ANNEALING IN WET OXYGEN [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1303 - &

[3] STACKING-FAULTS IN (100) EPITAXIAL SILICON CAUSED BY HF AND THERMAL OXIDATION AND EFFECTS ON P-N-JUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (11) : 4465 - &

[4] FISHER WA, 1966, J ELECTROCHEM SOC, V113, P1054

[5] HIRSCH PB, 1962, NPL C RELATION STRUC, P440

[6] NUCLEATION AND GROWTH OF STACKING-FAULTS IN EPITAXIAL SILICON DURING THERMAL OXIDATION [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (03) : 1302 - 1306

[7] IIZUKA T, 1968, LATTICE DEFECTS SEMI

[8] EXTRINSIC STACKING FAULTS IN SILICON AFTER HEATING IN WET OXYGEN [J]. APPLIED PHYSICS LETTERS, 1966, 8 (01) : 29 - +

[9] STACKING FAULTS IN STEAM-OXIDIZED SILICON [J]. ACTA METALLURGICA, 1966, 14 (10): : 1157 - &

[10] KOCK AJRD, 1971, J ELECTROCHEM SOC, V118, P1851

[1] DIFFRACTION CONTRAST ANALYSIS OF 2-DIMENSIONAL DEFECTS PRESENT IN SILICON AFTER ANNEALING [J]. PHILOSOPHICAL MAGAZINE, 1966, 13 (121): : 71 - &

[2] 2-DIMENSIONAL DEFECTS IN SILICON AFTER ANNEALING IN WET OXYGEN [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1303 - &

[3] STACKING-FAULTS IN (100) EPITAXIAL SILICON CAUSED BY HF AND THERMAL OXIDATION AND EFFECTS ON P-N-JUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (11) : 4465 - &

[4] FISHER WA, 1966, J ELECTROCHEM SOC, V113, P1054

[5] HIRSCH PB, 1962, NPL C RELATION STRUC, P440

[6] NUCLEATION AND GROWTH OF STACKING-FAULTS IN EPITAXIAL SILICON DURING THERMAL OXIDATION [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (03) : 1302 - 1306

[7] IIZUKA T, 1968, LATTICE DEFECTS SEMI

[8] EXTRINSIC STACKING FAULTS IN SILICON AFTER HEATING IN WET OXYGEN [J]. APPLIED PHYSICS LETTERS, 1966, 8 (01) : 29 - +

[9] STACKING FAULTS IN STEAM-OXIDIZED SILICON [J]. ACTA METALLURGICA, 1966, 14 (10): : 1157 - &

[10] KOCK AJRD, 1971, J ELECTROCHEM SOC, V118, P1851