PREPARATION AND CHARACTERIZATION OF TIO2 FILMS BY A NOVEL SPRAY PYROLYSIS METHOD

Films of anatase were prepared on silicon and silica supports by ultrasonic nebulization of an ethanol solution of titanium acetylacetonate followed by pyrolysis and annealing in oxygen at 380°C. The transformation to rutile occurred in the temperature range 800-950°C without degradation of the film quality. TiO2 films could be slightly reduced to TiO2-x at 500°C in an atmosphere of pure hydrogen and further reduction, giving increased conductivity, occurs at elevated temperature. These films were comparable in quality to those prepared by more elaborate techniques. © 1990.