PHOTOMETRIC ELLIPSOMETER FOR MEASURING FLUX IN A GENERAL STATE OF POLARIZATION

被引：15

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0039-6028(76)90443-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：161 / 169

页数：9

共 11 条

[1] Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6
[2] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[3] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1077 - &
[4] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[5] PHOTOMETRIC ELLIPSOMETER FOR MEASURING PARTIALLY POLARIZED-LIGHT
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (11) : 1274 - 1278
[6] BORN M, 1975, PRINCIPLES OPTICS, P554
[7] BORN M, 1975, PRINCIPLES OPTICS, P544
[8] Clark D. E., 1971, Proceedings of 20th international wire and cable symposium, P118
[9] PRESENT STATUS OF AUTOMATIC ELLIPSOMETERS
MULLER, RH
[J]. SURFACE SCIENCE, 1976, 56 (01) : 19 - 36
[10] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY
MULLER, RH
[J]. SURFACE SCIENCE, 1969, 16 : 14 - &