EFFECTS OF CRYSTALLINE DEFECTS ON ELECTRICAL-PROPERTIES IN SILICON FILMS ON SAPPHIRE

被引：24

作者：

ONGA, S

YOSHII, T

HATANAKA, K

YASUDA, Y

机构：

[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES & DEV CTR,KAWASAKI,JAPAN

[2] GAKUSHUIN UNIV,FAC SCI,TOKYO,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1976年 / 15卷

关键词：

D O I：

10.7567/JJAPS.15S1.225

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：225 / 231

页数：7

共 12 条

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[8]

OHMURA Y, 1975, J PHYS SOC JAPAN, V39, P491

[9]

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