FABRICATION OF ATOMIC-SCALE METALLIC MICROSTRUCTURES BY RETARDING-FIELD FOCUSED ION-BEAMS

被引：12

作者：

WOODHAM, RG

AHMED, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587612

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3280 / 3284

页数：5

共 10 条

[1] DIRECT ION-BEAM DEPOSITION FOR THIN-FILM FORMATION [J].

AMANO, J .

THIN SOLID FILMS, 1982, 92 (1-2) :115-122

[2]

CLEAVER JRA, 1983, MICROCIRCUIT ENG, V83, P135

[3]

GRABERT H, 1991, NATO ASI SERIES, V294

[4] A LOW MAGNIFICATION FOCUSED ION-BEAM SYSTEM WITH 8 NM SPOT SIZE [J].

KUBENA, RL ;

WARD, JW ;

STRATTON, FP ;

JOYCE, RJ ;

ATKINSON, GM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3079-3083

[5] SELECTIVE AREA DEPOSITION OF METALS USING LOW-ENERGY ELECTRON-BEAMS [J].

KUNZ, RR ;

ALLEN, TE ;

MAYER, TM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (05) :1427-1431

[6] FOCUSED ION-BEAM DIRECT DEPOSITION OF GOLD [J].

NAGAMACHI, S ;

YAMAKAGE, Y ;

MARUNO, H ;

UEDA, M ;

SUGIMOTO, S ;

ASARI, M ;

ISHIKAWA, J .

APPLIED PHYSICS LETTERS, 1993, 62 (17) :2143-2145

[7] SINGLE-ELECTRON MEMORY [J].

NAKAZATO, K ;

BLAIKIE, RJ ;

AHMED, H .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :5123-5134

[8] THE DEVELOPMENT OF A SPRAYER FOR FIELD-EMISSION DEPOSITION [J].

PREWETT, PD ;

GOWLAND, L ;

AITKEN, KL ;

MAHONY, CMO .

THIN SOLID FILMS, 1981, 80 (1-3) :117-124

[9] SINGLE-ELECTRON TUNNELING OBSERVED AT ROOM-TEMPERATURE BY SCANNING-TUNNELING MICROSCOPY [J].

SCHONENBERGER, C ;

VANHOUTEN, H ;

DONKERSLOOT, HC .

EUROPHYSICS LETTERS, 1992, 20 (03) :249-254

[10] FILM DEPOSITION AND BURIED LAYER FORMATION BY MASS-ANALYZED ION-BEAMS [J].

YAMADA, I ;

INOKAWA, H ;

TAKAGI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :439-446

← 1 →