CLOSED-TUBE DIFFUSION OF SILICON IN GAAS FROM SPUTTERED SILICON FILM

被引:10
作者
OMURA, E
WU, XS
VAWTER, GA
COLDREN, L
HU, E
MERZ, JL
机构
关键词
D O I
10.1049/el:19860337
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:496 / 498
页数:3
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