SELECTIVE ZN DIFFUSION IN N-GAAS WITH A SPUTTERED SI MASK AT 650-DEGREES-C

被引：12

作者：

OMURA, E

VAWTER, GA

COLDREN, L

MERZ, JL

机构：

来源：

ELECTRONICS LETTERS | 1986年 / 22卷 / 01期

关键词：

D O I：

10.1049/el:19860016

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：23 / 24

页数：2

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