CVD-SIO2 AND PLASMA-SINX FILMS AS ZN DIFFUSION MASKS FOR GAAS

被引：14

作者：

BLAAUW, C

SPRINGTHORPE, AJ

DZIOBA, S

EMMERSTORFER, B

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1984年 / 13卷 / 02期

关键词：

D O I：

10.1007/BF02656678

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：251 / 262

页数：12

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