TITANIUM DISULFIDE THIN-FILM PREPARED BY PLASMA CVD

被引：27

作者：

KIKKAWA, S ^{[1
]}

MIYAZAKI, M ^{[1
]}

KOIZUMI, M ^{[1
]}

机构：

[1] RYUKOKU UNIV,FAC SCI & TECHNOL,OTSU,SHIGA 52021,JAPAN

来源：

JOURNAL OF MATERIALS RESEARCH | 1990年 / 5卷 / 12期

关键词：

D O I：

10.1557/JMR.1990.2894

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Titanium disulfide films were prepared by plasma CVD. Crystalline orientation of layered TiS2 was investigated in relation to deposition rate, film thickness, and kinds of substrate. The preferred orientation of TiS2basal plane perpendicular to substrates was obtained on the films with their thickness of more than ca. 10 μm at the deposition rate of ca. 4 x 10–3 g/cm2. h on all kinds of substrate. This orientation resulted in a large discharge capacity in a lithium battery cathode application. © 1990, Materials Research Society. All rights reserved.

引用

页码：2894 / 2901

页数：8

共 15 条

[1] MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS
BUCK, V
[J]. WEAR, 1983, 91 (03) : 281 - 288
[2] STRUCTURE AND DENSITY OF SPUTTERED MOS2-FILMS
BUCK, V
[J]. VACUUM, 1986, 36 (1-3) : 89 - 94
[3] A NEGLECTED PARAMETER (WATER CONTAMINATION) IN SPUTTERING OF MOS2 FILMS
BUCK, V
[J]. THIN SOLID FILMS, 1986, 139 (02) : 157 - 168
[4] FUNDAMENTAL-ASPECTS OF THE ELECTRONIC-STRUCTURE, MATERIALS PROPERTIES AND LUBRICATION PERFORMANCE OF SPUTTERED MOS2 FILMS
FLEISCHAUER, PD
[J]. THIN SOLID FILMS, 1987, 154 (1-2) : 309 - 322
[5] NONSTOICHIOMETRY OF MOS2 PHASE PREPARED BY SPUTTERING
ITO, T
NAKAJIMA, K
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 37 (06): : 773 - 775
[6] TITANIUM DISULFIDE FILMS FABRICATED BY PLASMA CVD
KANEHORI, K
ITO, Y
KIRINO, F
MIYAUCHI, K
KUDO, T
[J]. SOLID STATE IONICS, 1986, 18-9 : 818 - 822
[7] PLASMA ASSISTED CVD OF TIS2
KIKKAWA, S
SHIMANOUCHIFUTAGAMI, R
KOIZUMI, M
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 49 (01): : 105 - 109
[8] KIKKAWA S, IN PRESS SOLID STATE
[9] Lince J. R., 1987, Journal of Materials Research, V2, P827, DOI 10.1557/JMR.1987.0827
[10] METAL CHALCOGENIDES AS REVERSIBLE ELECTRODES IN NON-AQUEOUS LITHIUM BATTERIES
MURPHY, DW
TRUMBORE, FA
[J]. JOURNAL OF CRYSTAL GROWTH, 1977, 39 (01) : 185 - 199

← 1 2 →