MEASUREMENT OF THE ELECTRICAL-PROPERTIES OF ELECTROMIGRATION SPECIMENS

被引：17

作者：

JONES, BK

XU, YZ

机构：

[1] School of Physics and Chemistry, Lancaster University

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 09期

关键词：

D O I：

10.1063/1.1145306

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A description is given of the design, implementation, and performance of a circuit to measure the electrical properties of resistive specimens of about 10 Omega such as are used in electromigration studies. The ac bridge can measure the changes in resistance, second-harmonic amplitude, second-harmonic phase shift, thermal noise, and excess (1/f) electrical noise. All the parameters can be monitored simultaneously and continuously. The performance is comparable with that of systems designed to measure each of the quantities only. The special features are that it is an autobalance bridge so that chan es in the measured quantities are recorded by the feedback signal, the spectrum analyzer is not overloaded, and the recovery of the noise signal is performed by software. (C) 1995 American Institute of Physics.

引用

页码：4676 / 4680

页数：5

共 17 条

[1] 1/F-ALPHA NOISE AND FABRICATION VARIATIONS OF TIW/A1 VLSI INTERCONNECTIONS [J].