MODIFICATION OF METAL-SILICON CONTACTS BY LOW-ENERGY ARGON ION-BOMBARDMENT

被引：4

作者：

CHOUIYAKH, A ^{[1
]}

LANG, B ^{[1
]}

机构：

[1] UNIV STRASBOURG 1, F-67070 STRASBOURG, FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1984年 / 19卷 / 12期

关键词：

D O I：

10.1051/rphysap:019840019012097100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：971 / 978

页数：8

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