RAPID THERMAL ANNEALING OF MODULATION-DOPED ALXGA1-XAS/GAAS HETEROSTRUCTURES FOR DEVICE APPLICATIONS

被引：20

作者：

PEARAH, P

HENDERSON, T

KLEM, J

MORKOC, H

NILSSON, B

WU, O

SWANSON, AW

CHEN, DR

机构：

[1] GOULD INC,RES CTR,ROLLING MEADOWS,IL 60008

[2] MICROWAVE MONOLITH INC,SIMI VALLEY,CA 93065

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 06期

关键词：

D O I：

10.1063/1.334197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1851 / 1855

页数：5

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