STRUCTURAL-PROPERTIES OF CDTE-ZNTE STRAINED-LAYER SUPERLATTICE GROWN ON GAAS BY HOT-WALL EPITAXY

被引:17
作者
SUGIYAMA, I
HOBBS, A
UEDA, O
SHINOHARA, K
TAKIGAWA, H
机构
[1] Fujitsu Laboratories Ltd., Atsugi 243-01
关键词
D O I
10.1063/1.104776
中图分类号
O59 [应用物理学];
学科分类号
摘要
CdTe-ZnTe strained-layer superlattices (SLSs) were grown on GaAs by hot-wall epitaxy. The individual layer thickness of the SLS is well controlled and the thickness fluctuation is less than +/- 1 monolayer. High-resolution transmission electron microscopy images show coherent SLS growth. We found that two-thirds of the threading dislocations can be reduced by inserting the SLS in CdTe/GaAs.
引用
收藏
页码:2755 / 2757
页数:3
相关论文
共 14 条
[1]   LOW DEFECT DENSITY CDTE(111)-GAAS(001) HETEROSTRUCTURES BY MOLECULAR-BEAM EPITAXY [J].
BALLINGALL, JM ;
TAKEI, WJ ;
FELDMAN, BJ .
APPLIED PHYSICS LETTERS, 1985, 47 (06) :599-601
[2]   CRITICAL THICKNESS IN EPITAXIAL CDTE/ZNTE [J].
CIBERT, J ;
GOBIL, Y ;
DANG, LS ;
TATARENKO, S ;
FEUILLET, G ;
JOUNEAU, PH ;
SAMINADAYAR, K .
APPLIED PHYSICS LETTERS, 1990, 56 (03) :292-294
[3]   EFFECTIVENESS OF STRAINED-LAYER SUPERLATTICES IN REDUCING DEFECTS IN GAAS EPILAYERS GROWN ON SILICON SUBSTRATES [J].
ELMASRY, N ;
TARN, JCL ;
HUMPHREYS, TP ;
HAMAGUCHI, N ;
KARAM, NH ;
BEDAIR, SM .
APPLIED PHYSICS LETTERS, 1987, 51 (20) :1608-1610
[4]   INTERACTIONS OF DISLOCATIONS IN GAAS GROWN ON SI SUBSTRATES WITH INGAAS-GAASP STRAINED LAYERED SUPERLATTICES [J].
ELMASRY, NA ;
TARN, JC ;
KARAM, NH .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (07) :3672-3677
[5]   CDTE-GAAS(100) INTERFACE - MBE GROWTH, RHEED AND XPS CHARACTERIZATION [J].
FAURIE, JP ;
HSU, C ;
SIVANANTHAN, S ;
CHU, X .
SURFACE SCIENCE, 1986, 168 (1-3) :473-482
[6]   DISLOCATION REDUCTION IN EPITAXIAL GAAS ON SI (100) [J].
FISCHER, R ;
NEUMAN, D ;
ZABEL, H ;
MORKOC, H ;
CHOI, C ;
OTSUKA, N .
APPLIED PHYSICS LETTERS, 1986, 48 (18) :1223-1225
[7]   GROWTH AND PROPERTIES OF HG1-XCDXTE ON GAAS SUBSTRATES BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
GHANDHI, SK ;
BHAT, IB ;
TASKAR, NR .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (06) :2253-2255
[8]  
HOBBS A, 1991, IN PRESS 7TH OXF C M
[9]   HOT WALL EPITAXY [J].
LOPEZOTERO, A .
THIN SOLID FILMS, 1978, 49 (01) :3-57
[10]   STRUCTURAL-PROPERTIES OF HG1-XZNX TE-CDTE STRAINED LAYER SUPERLATTICES AND THE REDUCTION OF THREADING DISLOCATIONS FROM A CDTE BUFFER LAYER [J].
PETRUZZELLO, J ;
OLEGO, D ;
CHU, X ;
FAURIE, JP .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :2980-2983