ROLE OF THE HYDROGEN-ATOM ON METASTABLE DEFECTS IN GAAS

被引:8
作者
CHO, HY [1 ]
KIM, EK [1 ]
MIN, SK [1 ]
LEE, CC [1 ]
机构
[1] KOREA INST SCI & TECHNOL, DEPT PHYS, SEOUL 136791, SOUTH KOREA
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 18期
关键词
D O I
10.1103/PhysRevB.43.14498
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Several deep-level defects in hydrogen-passivated GaAs doped with Si have been investigated. The defect transformation by atomic hydrogen confirms the assignment of these defects to metastable defects associated with a hydrogen atom. Thermal-annealing experiments under biased and unbiased conditions confirm that during hydrogenation a deep level at 0.60 eV below the conduction band is generated, as a metastable defect for the native deep level at 0.42 eV below the conduction band, and the complete passivation of the 0.42- or the 0.33-eV trap during hydrogenation is due to passivation of the trap by a hydrogen-atom-forming hydrogen-defect complex. The first-order kinetics permits a precise estimate of the formation and annealing frequencies v(f) and v(a) of the hydrogen-defect pair. The temperature-dependent values of v(a) for the 0.60-eV trap satisfy the relation v(a) = (0.82 X 10(13)exp[(-1.61 +/- 0.04 eV)/kT] s-1. We propose that this activation energy could be the value required for the release of a hydrogen atom bound to a point defect in GaAs.
引用
收藏
页码:14498 / 14503
页数:6
相关论文
共 30 条
[1]   NEW METASTABLE DEFECTS IN GAAS [J].
BUCHWALD, WR ;
JOHNSON, NM ;
TROMBETTA, LP .
APPLIED PHYSICS LETTERS, 1987, 50 (15) :1007-1009
[2]   ELECTRICAL AND OPTICAL CHARACTERIZATION OF METASTABLE DEEP-LEVEL DEFECTS IN GAAS [J].
BUCHWALD, WR ;
GERARDI, GJ ;
POINDEXTER, EH ;
JOHNSON, NM ;
GRIMMEISS, HG ;
KEEBLE, DJ .
PHYSICAL REVIEW B, 1989, 40 (05) :2940-2945
[3]   METASTABLE-DEFECT BEHAVIOR IN SILICON - CHARGE-STATE-CONTROLLED REORIENTATION OF IRON-ALUMINUM PAIRS [J].
CHANTRE, A ;
BOIS, D .
PHYSICAL REVIEW B, 1985, 31 (12) :7979-7988
[4]   DONOR NEUTRALIZATION IN GAAS(SI) BY ATOMIC-HYDROGEN [J].
CHEVALLIER, J ;
DAUTREMONTSMITH, WC ;
TU, CW ;
PEARTON, SJ .
APPLIED PHYSICS LETTERS, 1985, 47 (02) :108-110
[5]   CREATION OF DEEP LEVELS IN HORIZONTAL BRIDGMAN-GROWN GAAS BY HYDROGENATION [J].
CHO, HY ;
KIM, EK ;
MIN, SK ;
KIM, JB ;
JANG, J .
APPLIED PHYSICS LETTERS, 1988, 53 (10) :856-858
[6]   PHOTOQUENCHING EFFECT AND THERMAL RECOVERY PROCESS FOR MIDGAP LEVELS IN GAAS - AN EL2 FAMILY IN GAAS [J].
CHO, HY ;
KIM, EK ;
MIN, SK .
PHYSICAL REVIEW B, 1989, 39 (14) :10376-10379
[7]  
CHO HY, 1989, J APPL PHYS, V66, P3040
[8]   PASSIVATION OF DEEP LEVEL DEFECTS IN MOLECULAR-BEAM EPITAXIAL GAAS BY HYDROGEN PLASMA EXPOSURE [J].
DAUTREMONTSMITH, WC ;
NABITY, JC ;
SWAMINATHAN, V ;
STAVOLA, M ;
CHEVALLIER, J ;
TU, CW ;
PEARTON, SJ .
APPLIED PHYSICS LETTERS, 1986, 49 (17) :1098-1100
[9]   PASSIVATION AND GENERATION OF DEEP LEVEL DEFECTS IN HYDROGENATED NORMAL-GAAS(SI) [J].
JALIL, A ;
HEURTEL, A ;
MARFAING, Y ;
CHEVALLIER, J .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (12) :5854-5861
[10]   TRANSIENT CAPACITANCE STUDIES OF AN ELECTRON TRAP AT EC-ET=0.105EV IN PHOSPHORUS-DOPED SILICON [J].
JELLISON, GE .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5715-5719