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- [4] REACTIVE ION ETCHING OF GAAS IN A CHLORINE PLASMA [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (01): : 85 - 88
- [9] GAAS AND GAALAS REACTIVE ION ETCHING IN BCL3-CL2 MIXTURE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (09): : L731 - L733