PRINCIPAL ANGLE SPECTROSCOPIC ELLIPSOMETRY UTILIZING A ROTATING ANALYZER

被引：10

作者：

CHANDLERHOROWITZ, D

CANDELA, GA

机构：

来源：

APPLIED OPTICS | 1982年 / 21卷 / 16期

关键词：

D O I：

10.1364/AO.21.002972

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

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页码：2972 / 2977

页数：6

相关论文

共 15 条

[1] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[2] STUDIES OF SURFACE, THIN-FILM AND INTERFACE PROPERTIES BY AUTOMATIC SPECTROSCOPIC ELLIPSOMETRY
ASPNES, DE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 289 - 295
[3] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
[4] PRECISION BOUNDS TO ELLIPSOMETER SYSTEMS
ASPNES, DE
[J]. APPLIED OPTICS, 1975, 14 (05): : 1131 - 1136
[5] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[6] PRINCIPAL ANGLE, PRINCIPAL AZIMUTH, AND PRINCIPAL-ANGLE ELLIPSOMETRY OF FILM-SUBSTRATE SYSTEMS
AZZAM, RMA
ZAGHLOUL, ARM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (08) : 1058 - 1065
[7] AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, pCH4
[8] PARAMETER CORRELATION AND PRECISION IN MULTIPLE-ANGLE ELLIPSOMETRY
BUABBUD, GH
BASHARA, NM
[J]. APPLIED OPTICS, 1981, 20 (17): : 3020 - 3026
[9] PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY
IBRAHIM, MM
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (12) : 1622 - &
[10] A photoelectric method for the determination of the parameters of elliptically polarized light
Kent, CV
Lawson, J
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1937, 27 (03) : 117 - 119