USE OF RAMAN-SPECTROSCOPY TO CHARACTERIZE STRAIN IN III-V EPILAYERS - APPLICATION TO INAS ON GAAS(001) GROWN BY MOLECULAR-BEAM EPITAXY

被引:7
作者
DIEBOLD, AC [1 ]
STEINHAUSER, SW [1 ]
MARIELLA, RP [1 ]
机构
[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB, LIVERMORE, CA 94550 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 02期
关键词
D O I
10.1116/1.584752
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:365 / 370
页数:6
相关论文
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