ON THE ORIGIN OF OVAL DEFECT WITH NUCLEUS ON EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY

被引:7
作者
NISHIKAWA, Y
KANAMOTO, K
TOKUDA, Y
FUJIWARA, K
NAKAYAMA, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 06期
关键词
D O I
10.1143/JJAP.25.908
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:908 / 909
页数:2
相关论文
共 9 条
[1]   MICROTWINNING AND GROWTH DEFECTS IN GAAS MBE LAYERS [J].
BAFLEUR, M ;
MUNOZYAGUE, A ;
ROCHER, A .
JOURNAL OF CRYSTAL GROWTH, 1982, 59 (03) :531-538
[2]   SOURCE AND ELIMINATION OF OVAL DEFECTS ON GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY [J].
CHAI, YG ;
CHOW, R .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :796-798
[3]   EFFECTS OF SUBSTRATE PREPARATION CONDITIONS ON GAAS OVAL DEFECTS GROWN BY MOLECULAR-BEAM EPITAXY [J].
FUJIWARA, K ;
NISHIKAWA, Y ;
TOKUDA, Y ;
NAKAYAMA, T .
APPLIED PHYSICS LETTERS, 1986, 48 (11) :701-703
[4]   STRUCTURE-ANALYSIS OF OVAL DEFECT ON MOLECULAR-BEAM EPITAXIAL GAAS LAYER BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION [J].
KAKIBAYASHI, H ;
NAGATA, F ;
KATAYAMA, Y ;
SHIRAKI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (11) :L846-L848
[5]   THE MBE GROWTH OF GAAS FREE OF OVAL DEFECTS [J].
PETTIT, GD ;
WOODALL, JM ;
WRIGHT, SL ;
KIRCHNER, PD ;
FREEOUF, JL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (02) :241-242
[6]   SURFACE-DEFECTS ON MBE-GROWN GAAS [J].
SUZUKI, Y ;
SEKI, M ;
HORIKOSHI, Y ;
OKAMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (02) :164-167
[7]   SURFACE DEFECT FORMATION IN GAAS-LAYERS GROWN ON INTENTIONALLY CONTAMINATED SUBSTRATE BY MOLECULAR-BEAM EPITAXY [J].
WATANABE, N ;
FUKUNAGA, T ;
KOBAYASHI, KLI ;
NAKASHIMA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (07) :L498-L500
[8]   PARTICULATES - AN ORIGIN OF GAAS OVAL DEFECTS GROWN BY MOLECULAR-BEAM EPITAXY [J].
WENG, SL ;
WEBB, C ;
CHAI, YG ;
BANDY, SG .
APPLIED PHYSICS LETTERS, 1985, 47 (04) :391-393
[9]   ON THE ORIGIN AND ELIMINATION OF MACROSCOPIC DEFECTS IN MBE FILMS [J].
WOOD, CEC ;
RATHBUN, L ;
OHNO, H ;
DESIMONE, D .
JOURNAL OF CRYSTAL GROWTH, 1981, 51 (02) :299-303