PRESERVATION OF INP SUBSTRATES IN VAPOR-PHASE EPITAXY - THE EFFECT OF EXCESS PH3

被引：7

作者：

DIGIUSEPPE, MA

CHIN, AK

ERMANIS, F

PETICOLAS, LJ

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1985年 / 73卷 / 02期

关键词：

D O I：

10.1016/0022-0248(85)90307-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：311 / 315

页数：5

共 22 条

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[8]

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