INFRARED-ABSORPTION OF THIN-FILMS DEPOSITED FROM TETRAETHYLGERMANIUM IN RF GLOW-DISCHARGES

被引：5

作者：

GAZICKI, M

SZYMANOWSKI, H

SCHALKO, J

MALINOVSKY, L

机构：

[1] VIENNA TECH UNIV, INST ALLGEMEINE ELEKTROTECH & ELEKTR, A-1040 VIENNA, AUSTRIA

[2] SAV, USTAV FYZIKALNEJ ELEKTR, PIESTANY, CZECHOSLOVAKIA

来源：

THIN SOLID FILMS | 1993年 / 230卷 / 02期

关键词：

D O I：

10.1016/0040-6090(93)90495-B

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：81 / 85

页数：5

共 17 条

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