ELIMINATION OF STACKING-FAULTS IN SILICON BY TRICHLOROETHYLENE OXIDATION

[1] DIFFRACTION CONTRAST ANALYSIS OF 2-DIMENSIONAL DEFECTS PRESENT IN SILICON AFTER ANNEALING [J]. PHILOSOPHICAL MAGAZINE, 1966, 13 (121): : 71 - &

[2] 2-DIMENSIONAL DEFECTS IN SILICON AFTER ANNEALING IN WET OXYGEN [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1303 - &

[3] Burgess R.R., 1973, SEMICONDUCTOR SILICO, P363

[4] OXIDE CHARGE REDUCTION BY CHEMICAL GETTERING WITH TRICHLOROETHYLENE DURING THERMAL OXIDATION OF SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (02) : 223 - +

[5] LOW-FREQUENCY NOISE IN HCL PROCESSED IGFETS [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (06) : 859 - 860

[6] EFFECTS OF TRICHLOROETHYLENE-OXIDATION ON CHARACTERISTICS OF MOS DEVICES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : 436 - 439

[7] HATTORI T, 1975, 8TH S SEM IC TECHN E, P19

[8] HATTORI T, UNPUBLISHED DATA

[9] ANOMALOUS TEMPERATURE EFFECT OF OXIDATION STACKING-FAULTS IN SILICON [J]. APPLIED PHYSICS LETTERS, 1975, 27 (04) : 165 - 167

[10] KOBAYASHI K, 1974, DENKI KAGAKU, V42, P294

[1] DIFFRACTION CONTRAST ANALYSIS OF 2-DIMENSIONAL DEFECTS PRESENT IN SILICON AFTER ANNEALING [J]. PHILOSOPHICAL MAGAZINE, 1966, 13 (121): : 71 - &

[2] 2-DIMENSIONAL DEFECTS IN SILICON AFTER ANNEALING IN WET OXYGEN [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1303 - &

[3] Burgess R.R., 1973, SEMICONDUCTOR SILICO, P363

[4] OXIDE CHARGE REDUCTION BY CHEMICAL GETTERING WITH TRICHLOROETHYLENE DURING THERMAL OXIDATION OF SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (02) : 223 - +

[5] LOW-FREQUENCY NOISE IN HCL PROCESSED IGFETS [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (06) : 859 - 860

[6] EFFECTS OF TRICHLOROETHYLENE-OXIDATION ON CHARACTERISTICS OF MOS DEVICES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : 436 - 439

[7] HATTORI T, 1975, 8TH S SEM IC TECHN E, P19

[8] HATTORI T, UNPUBLISHED DATA

[9] ANOMALOUS TEMPERATURE EFFECT OF OXIDATION STACKING-FAULTS IN SILICON [J]. APPLIED PHYSICS LETTERS, 1975, 27 (04) : 165 - 167

[10] KOBAYASHI K, 1974, DENKI KAGAKU, V42, P294