Diamond synthesis by capacitively coupled radio frequency plasma with the addition of direct current power

被引：9

作者：

Chattopadhyay, KK

Matsumoto, S

机构：

[1] National Institute for Research in Inorganic Materials, Tsukuba-city 305

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 26期

关键词：

D O I：

10.1063/1.114422

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamond films were synthesized by using radio frequency (RF) power in a capacitively coupled mode with a parallel plate electrode configuration in which direct current (DC) power was also applied simultaneously. This new plasma method is superior to plain DC plasma chemical vapor deposition (CVD) techniques for diamond deposition since it is very stable and seems readily scaleable. Good quality diamond films were synthesized by this modified plasma CVD method. The effect of variation of both RF and DC parameters on the deposited diamond films is discussed. (C) 1995 American Institute of Physics.

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页码：3972 / 3974

页数：3

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