SOLUBILITY OF IMPLANTED DOPANTS IN POLYSILICON - PHOSPHORUS AND ARSENIC

被引：6

作者：

LIFSHITZ, N

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 12期

关键词：

D O I：

10.1149/1.2119614

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2464 / 2467

页数：4

共 13 条

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